Secondary-ion mass spectrometry

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Science and technology

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What Wikipedia says

Secondary-ion mass spectrometry (SIMS) is a technique used to analyze the composition of solid surfaces and thin films by sputtering the surface of the specimen with a focused primary ion beam and collecting and analyzing ejected secondary ions.

Excerpt from the Wikipedia article “Secondary-ion mass spectrometry”, under the CC BY-SA 4.0 license. Read the article on Wikipedia

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