Thermal oxidation

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Notion

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Science and technology

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What Wikipedia says

In microfabrication, thermal oxidation is a way to produce a thin layer of oxide (usually silicon dioxide) on the surface of a wafer. The technique forces an oxidizing agent to diffuse into the wafer at high temperature and react with it. The rate of oxide growth is often predicted by the Deal–Grove model.

Excerpt from the Wikipedia article “Thermal oxidation”, under the CC BY-SA 4.0 license. Read the article on Wikipedia

Image: Guillaume Paumier (user:guillom), CC BY-SA 3.0, via Wikimedia Commons.